Superior performance with higher reliability
Our patented megasonic technology is designed to be controlled and measured. Our systems are engineered to be reliable, durable, and repairable.
Our patented megasonic technology is designed to be controlled and measured. Our systems are engineered to be reliable, durable, and repairable.
Higher PRE with no adders. Easy integration into batch and single-wafer equipment. Our systems prioritize reliability, durability, and repairability.
The original, patented
When you work with ProSys you get:
with lower operating costs through our proprietary Direct Batch Technology,
and absolute particle neutrality using our patented MegPie™ technology for processing single substrates,
greater than 99% PRE when measured at 19 nm in mass volume production
in chemistry-based processes for higher yield in shorter cycle times, often using benign chemistries,
that identifies process improvement opportunities & will predict preventative maintenance, and
is the foundation of our extensive application research, ensuring that you get the most from your application.
Our MegPie™ Acoustics technology modernizes legacy systems, including the DNS (Screen) Scrubber Brush, delivering substantial enhancements in both performance and efficiency.
Elevate to Prosys’ megasonic cleaning with a complete plug-and-play solution that replaces obsolete arrays and electronics. Designed for your existing tank, it integrates seamlessly without software changes.
The ProSys Direct Megasonic Batch System is an easy-to-install upgrade for existing wet benches, providing ProSys megasonic benefits without needing new tools or costly software updates.
Contact us for product demos, cleaning solutions, distributor opportunities, or any queries about our company and products. Let’s start the conversation and find the answers you need.