NEWS: ProSys Announces Replacement for legacy Verteq/Marteq Megasonic Sunburst. Find out more!

MegPie™ V4

The MegPie™ V4 economically delivers outstanding non-contact cleaning for backside scrubber applications. It is based on the proven MegPie™ V3 design and specifically adapted to fit backside scrubber application requirements.

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  • Incorporates MegPie V3 transducer construction that achieves 98% particle removal down to 19nm
  • Fluid delivery manifold allows up to 100 RPM to eliminate fluid wrap
  • RS-232 connectivity for streaming forward power, alarms and warnings
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  • Sapphire resonator is particle neutral and compatible with process chemistry
  • NanoPower™ electronics provides max. 50W continuous wave RF at nominal 925 kHz
  • Transducer assembly uses patented crystal bonding and RF circuitry connections
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  • Matching network is internal to the MegPie™ V4
  • RTD and purge connections are not required
  • NanoPower™ features front panel input and compact half-rack 2.5U form factor 300mm wafer

The MegPie V4 enables the removal of both smaller particles and more particles, in order to meet the tighter requirements of advanced nodes — supporting the industry roadmap for backside scrubber applications.