NEWS: ProSys Announces Replacement for legacy Verteq/Marteq Megasonic Sunburst. Find out more!

Dual Zone MegPie™

The Dual Zone MegPie™ is a megasonic transducer for cleaning and sonochemical processing of two substrate sizes in one chamber. It applies a radially uniform dose of acoustic energy, improves process efficiency, lowers process time, and is easy to retrofit to existing processing tools.

features & benefits

  • Processes two sizes of substrates: 150/200, 200/300, or 300/450mm
  • The sapphire resonator is particle neutral and will not add particles to the process
  • Patented crystal bond to the resonator
  • Patented RF connection to the crystal
  • Redundant internal RTD temperature monitoring
  • Custom sizes available
  • Sapphire resonator compatible with all processing chemistries
  • Uniform direct acoustic energy applied to the process
  • Increased process efficiency
  • Reduced process time
  • Reduced process chemistry usage
  • No moving parts to maintain
  • No consumables – works better than brushes