Switchable frequency bands. Quarter- and third-width cabinets. One command set from the smallest unit to the largest. SONIQ replaces a shelf of different generators with a single platform — and the first model is shipping.
Megasonic processes do not all want the same frequency or the same power. Until now that meant different generators with different interfaces, different spares and different integration work every time. SONIQ ends that: the models differ in what they deliver, not in how you talk to them.
The same ASCII command set runs on every SONIQ model over RS-232 and Ethernet. Software written for the 100 Flex works with the 200 and the 1500 — a tool qualified on one generator stays qualified when the process moves to another.
The SONIQ 100 Flex covers 465 kHz and 925 kHz in one unit, and the 2/3 MHz offers the choice between 2 MHz and 3 MHz. One generator type serves transducers in either band, so the fab holds one spare instead of two.
The SONIQ 100 Flex and Pico Power each take a quarter of a 2U 19″ rack; the SONIQ 200 takes a third. Four 100 Flex units fit where one legacy 2U generator sat, and at 3 kg a single unit mounts inside the tool frame with no rack at all.
The SONIQ 100 Flex is released and available to order. The remaining models are in release preparation and follow over the coming weeks.
| SONIQ 100 Flex Available now | SONIQ 200 925 kHz Coming soon | SONIQ 200 2 / 3 MHz Coming soon | SONIQ 1500 Coming soon | SONIQ Pico Power Coming soon | |
|---|---|---|---|---|---|
| RF power | 100 W | 200 W | 200 W | 1500 W | 50 W |
| Frequency | 465 / 925 kHz switchable |
925 kHz | 2 or 3 MHz separate versions |
925 kHz | 465 or 925 kHz separate versions |
| Pulsing | ✓ | ✓ | ✓ | ✓ | — |
| Dual zone | — | ✓ | ✓ | — | — |
| RTD temperature monitoring | ✓ 2 RTD | ✓ | ✓ | ✓ 4 RTD | — |
| Communication | |||||
| Ethernet (TCP/IP) | ✓ | ✓ | ✓ | ✓ | — |
| RS-232 | ✓ | ✓ | ✓ | ✓ | — |
| Analog user I/O | ✓ | ✓ | ✓ | ✓ | ✓ |
| Mechanical | |||||
| Rack width | ¼ of 2U 19″ 35.0 × 10.7 × 8.4 cm |
⅓ of 2U 19″ 35.0 × 14.2 × 8.4 cm |
⅓ of 2U 19″ 35.0 × 14.2 × 8.4 cm |
On release | ¼ of 2U 19″ |
| Country of origin | Germany | Germany | Germany | Germany | Germany |
Scroll the table sideways to compare all five models
100 W of forward-regulated megasonic power, switchable between 465 kHz and 925 kHz, in a cabinet the size of a shoebox. It drives ProSys MegPie™ transducers, BevelSonic devices and tabletop systems within its power class, and it is available to order today.
Four indicators carry the state of the process across the aisle: power, RF active, fault, interlock. Everything else lives on the network.
RF output into 50 Ω
Switchable frequency bands (kHz)
Four units per 2U 19″ rack
Mount it in the tool frame
The SONIQ 100 Flex pairs efficient amplifier circuitry with switched-mode supplies, and puts a purpose-written firmware controller between them and your process.
The 100 W class covers the majority of single-substrate megasonic work. Where a process needs more power, two zones or a higher frequency, the same interface carries over to the rest of the series.
FEOL and BEOL cleans, post-CMP, pre-bond and post-debond, mask cleaning, resist develop and strip, TSV and via residue removal, on substrates from 75 mm to 450 mm.
Contactless edge bevel processing at low flow and low rotation, where fine power resolution matters more than absolute power.
ProSys tabletop megasonic systems, sonochemistry benches and research installations that need traceable, logged acoustic dosing.
Get in touch and ProSys will help you find the right configuration for your process. We are glad to answer technical questions, prepare a quote, or keep you posted as the rest of the series releases.
