ProSys megasonic technology builds on the inverse piezoelectric effect, where electrical energy is converted to mechanical energy by a piezoelectric crystal. A ceramic piezoelectric crystal is excited by high-frequency AC voltage, causing it to vibrate. This vibration generates an acoustic pressure wave that is transmitted through a coupling fluid, producing controlled cavitation. ProSys designs with nominal 925 kHz radio frequency electrical energy to excite these ceramic crystals, producing megasonic acoustic sound waves from the transducer assembly.
Megasonic cleaning uses the piezoelectric effect to boost removal of submicron particles from substrates. As the acoustic wave passes across the surface of an object, it reduces the boundary layer and dislodges particles from the surface being cleaned. Cavitations within the boundary layer improve particle removal, too. These removed particles are then carried away by the bulk fluid flow. ProSys megasonic is commonly used in volume production tools to achieve PRE greater than 98% when measured at 19 nm.
This acoustic wave also refreshes chemistry at the liquid/surface interface. Maintaining fresh chemistry drives greater chemical reaction kinetics. Improved kinetics generate higher yields and reduce cycle times. Commonly, megasonic energy also allows benign chemistries to replace traditional ones that are now tightly regulated. This effect is commonly deployed in applications dependent on chemical reactions, such as photoresist develop, metal lift-off, or residual removal.
ProSys megasonic products are used in cleaning applications or to boost kinetics in processes dependent on chemical reactions.
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Reach out to ProSys Megasonic for expert insights on our advanced cleaning technology. Our team is ready to explain how our solutions can tackle your specific cleaning challenges. Contact us to learn more or to schedule a personalized consultation. Let’s find the right cleaning solution for you.
