NEWS: ProSys Announces Replacement for legacy Verteq/Marteq Megasonic Sunburst. Find out more!

Published Papers

ProSys Megasonics leads with innovation, working alongside top companies and research institutions. Our published papers reflect this commitment to industry leadership and collaborative progress.

Megasonic Technology

Dive into the forefront of megasonic technology with ProSys Megasonics' specialized research. Our papers detail groundbreaking methods and revolutionary applications, now available exclusively upon request. Here's a glimpse of the topics we cover:

  • Supramolecular assemblies enhancing shallow trench isolation cleaning
  • Novel sono-electrochemical techniques for particle removal
  • Innovative solvent-free phase-fluids for wafer resist processing
  • Advanced photoresist stripping methods using DiO3
  • Simplified cavitation for analyzing sonoluminescence in megasonic-treated solutions
  • Process control advancements in megasonic-enhanced pre-bonding cleaning
  • Efficiency comparisons between direct and indirect megasonic tank systems
  • Acoustic energy applications in MEMS manufacturing
  • Aligned wafer bonding techniques for CMOS-MEMS and 3D integration
  • Control and reduction of wafer damage with CO2-enriched deionized water

Request Paper

For full access to our research, please get in touch with us directly at ProSys Megasonics.

MEET US AT SEMICON SEA

Meet the ProSys Team at SEMICON SEA 2025!
May 20–22, 2025
Sands Expo & Convention Centre, Singapore

We’re excited to be exhibiting in collaboration with our Southeast Asia representative, Semiconductor Technologies Singapore.

Find us at Booth B1509
Stop by to discover our latest innovations and connect with our experts!

Feel free to contact us ahead of time to arrange an appointment. We’re excited about the opportunity to meet with you!

CONTACT US