NEWS: ProSys Announces Replacement for legacy Verteq/Marteq Megasonic Sunburst. Find out more!

MegPie™ V3

The MegPie™ V3 megasonic transducer is for non-contact cleaning or sonochemical processing a single rotating substrate. It applies a radially uniform dose of acoustic energy to improve process results with low operating costs. Operating conditions are continuously measured to ensure consistent outcomes.

turquoise circle w ring & shadow
  • PRE ≥ 98% for particles down to 19 nm
  • Every portion of the wafer
  • For every wafer processed
purple circle w ring & shadow
  • Chemistry flexibility
  • Zero particles added
  • No surface pitting
  • Stainless steel for solvent applications
orange circle w ring & shadow
  • MTBF ≥ 209,000 hours
  • No PM, no consumables
  • Less than 1 lpm process fluid for 300mm wafer
magenta ciircle w ring & shadow
  • Sonic dosage
  • Reflected power
  • Temperature
  • Electrical parameters

Industry standard for FEOL / BEOL particle removal •  post-CMP cleaning • mask cleaning • pre-bond cleaning • post-dicing cleaning • MEMS cleaning  

MEET US AT SEMICON SEA

Meet the ProSys Team at SEMICON SEA 2025!
May 20–22, 2025
Sands Expo & Convention Centre, Singapore

We’re excited to be exhibiting in collaboration with our Southeast Asia representative, Semiconductor Technologies Singapore.

Find us at Booth B1509
Stop by to discover our latest innovations and connect with our experts!

Feel free to contact us ahead of time to arrange an appointment. We’re excited about the opportunity to meet with you!

CONTACT US