NEWS: ProSys Announces Replacement for legacy Verteq/Marteq Megasonic Sunburst. Find out more!

Legacy System Plug-and-Play Replacement

The ProSys Direct Megasonic Batch System is a plug-and-play replacement ready to install into your existing rear mount or legacy wet bench. Easily add the uniformity and process measurement advantages of ProSys megasonic without the expense of a complete new tool or costly software modifications.

features & benefits

  • Direct replacement for your legacy Megasonic system
  • Dual 150mm or 200mm
  • IMPulse control interface is a plug-in replacement of the SPA-400
  • Replaceable and repairable transducer array
  • 4-sided weir overflow
  • Bottom-side fluid input
  • Quartz bottom-mounted transducer
  • Easy to install and operate
  • Lower capital cost than indirect Megasonic systems
  • Lower installation and operating cost than indirec
  • Better uniformity with direct Megasonic cleaning than indirec
  • Direct at 1.6 Watt/cm² = indirect at 4 Watt/cm²

MEET US AT SEMICON SEA

Meet the ProSys Team at SEMICON SEA 2025!
May 20–22, 2025
Sands Expo & Convention Centre, Singapore

We’re excited to be exhibiting in collaboration with our Southeast Asia representative, Semiconductor Technologies Singapore.

Find us at Booth B1509
Stop by to discover our latest innovations and connect with our experts!

Feel free to contact us ahead of time to arrange an appointment. We’re excited about the opportunity to meet with you!

CONTACT US