NEWS: ProSys Announces Replacement for legacy Verteq/Marteq Megasonic Sunburst. Find out more!

Dual Zone MegPie™

The Dual Zone MegPie™ is a megasonic transducer for cleaning and sonochemical processing of two substrate sizes in one chamber. It applies a radially uniform dose of acoustic energy, improves process efficiency, lowers process time, and is easy to retrofit to existing processing tools.

features & benefits

  • Processes two sizes of substrates: 150/200, 200/300, or 300/450mm
  • The sapphire resonator is particle neutral and will not add particles to the process
  • Patented crystal bond to the resonator
  • Patented RF connection to the crystal
  • Redundant internal RTD temperature monitoring
  • Custom sizes available
  • Sapphire resonator compatible with all processing chemistries
  • Uniform direct acoustic energy applied to the process
  • Increased process efficiency
  • Reduced process time
  • Reduced process chemistry usage
  • No moving parts to maintain
  • No consumables – works better than brushes

MEET US AT SEMICON SEA

Meet the ProSys Team at SEMICON SEA 2025!
May 20–22, 2025
Sands Expo & Convention Centre, Singapore

We’re excited to be exhibiting in collaboration with our Southeast Asia representative, Semiconductor Technologies Singapore.

Find us at Booth B1509
Stop by to discover our latest innovations and connect with our experts!

Feel free to contact us ahead of time to arrange an appointment. We’re excited about the opportunity to meet with you!

CONTACT US