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ProSys Applications Overview

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Using high-frequency acoustic energy, our advanced megasonics technology enables you to more tightly control your process and to make it faster and more efficient.
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Problems we solve include:
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FEOL and BEOL cleans
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Post-CMP/polish cleaning
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Photoresist develop and strip, including thick resist
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TSV & HAR cleaning and residual polymer removal
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LIGA/MEMS process applications
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Pre-bond cleaning
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Mask cleaning
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Solar process applications
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Contact us to explore how we can help with your specific cleaning or processing challenges.
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Quick Response

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Contact us to discuss how ProSys Megasonics can help with your specific cleaning or processing challenges.
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ProSys logo image links to web page Direct Megasonics Batch Systems image links to SolarBar product note image links to IMPulse RD product note image links to Plate Array product note image links to Sapphire MegPie product note image links to Immersible Array product note