Superior performance with higher reliability

Our patented megasonic technology is designed to be controlled and measured. Our systems are engineered to be reliable, durable, and repairable.

Our patented megasonic technology is designed to be controlled and measured

Higher PRE with no adders. Easy integration into batch and single-wafer equipment. Our systems prioritize reliability, durability, and repairability.

Our Key Advantages

When you work with ProSys you get:

Higher yield

with lower operating costs through our proprietary Direct Batch Technology,

Radial uniformity

and absolute particle neutrality using our patented MegPie™ technology for processing single substrates,

Cleaning performance

greater than 99% PRE when measured at 19 nm in mass volume production

Increased kinetics

in chemistry-based processes for higher yield in shorter cycle times, often using benign chemistries,

Real-time data

that identifies process improvement opportunities & will predict preventative maintenance, and

Process knowledge

is the foundation of our extensive application research, ensuring that you get the most from your application.

Replacement & Upgrades for Legacy Systems

DNS Scrubber Brush Replacement Kit MegPie

Our MegPie™ Acoustics technology modernizes legacy systems, including the DNS (Screen) Scrubber Brush, delivering substantial enhancements in both performance and efficiency.

Verteq Sunburst Upgrade: Complete Plug & Play solution

Elevate to Prosys’ megasonic cleaning with a complete plug-and-play solution that replaces obsolete arrays and electronics. Designed for your existing tank, it integrates seamlessly without software changes.

plug & play Direct Megasonic Batch System

The ProSys Direct Megasonic Batch System is an easy-to-install upgrade for existing wet benches, providing ProSys megasonic benefits without needing new tools or costly software updates.

Get in touch with us!

Contact us for product demos, cleaning solutions, distributor opportunities, or any queries about our company and products. Let’s start the conversation and find the answers you need.