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ProSys Patents Granted

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U.S. Patents: 16
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6,047,246 Computer Controlled Ultrasonic Cleaning System
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6,188,162 High Power Megasonic Transducer
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6,222,305 Chemically Inert Megasonic Transducer
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6,431,908 Method for Spring Contact & Matching Megasonic Transducers
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6,549,860 Method and Apparatus for Tuning a Megasonic Transducer
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6,722,379 Quartz Megasonic Tank System
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6,791,242 Radial Power Megasonic Transducer
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6,882,087 Uniform Energy Megasonic Transducer Using Vessel as Resonator
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6,904,921 Indium or Tin Bonded Megasonic Transducer Systems
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6,946,774 Segmented Uniform Energy Megasonic Transducer
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7,105,985 Megasonics Transducer with a Focused Energy Resonator
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7,141,917 Wedge Shaped Uniform Energy Megasonics Transducer >2MHz
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7,145,286 Indium or Tin Bonded Transducers >2MHz
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7,443,079 Method and Apparatus for Cavitation Threshold Characterization & Control
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7,683,525 Method for Cavitation Threshold Characterization and Control
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9,796,000 Fluid Delivery Manifold for the MegPie
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Foreign Patents: 31

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EP 1210738 B1 Chemically Inert Megasonic Transducers – validated in 5 countries: Germany, Belgium, France, Austria & UK
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EP 1449268 B1 Radial Power Megasonic Transducer – validated in 7 countries: Austria, Belgium, Germany, France, UK, Italy & Netherlands
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EP 1800355 B1 Cavitation Threshold Characterization & Control – validated in 5 countries: Germany, Belgium, France, Austria & UK
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HK1075541 Radial Power Megasonic Transducer – Hong Kong
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JP 4156520 B2 Radial Power Megasonic Transducer – Japan
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ZL 02821506.0 Radial Power Megasonic Transducer – China
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ZL 200580031073.6 Cavitation Threshold Characterization & Control – China
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86807 Chemically Inert Megasonic Transducer – Singapore
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0927493 Radial Power Megasonic Transducer – Korea
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104028 Radial Power Megasonic Transducer – Singapore
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130442 Cavitation Threshold Characterization & Control – Singapore
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162149 Chemically Inert Megasonic Transducers – Taiwan
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165984 Radial Power Megasonic Transducer > 2MHz – Singapore
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202216 Radial Power Megasonic Transducer – Taiwan
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0927493 Radial Power Megasonic Transducer – Korea
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10-0681071 Chemically Inert Megasonic Transducers – Korea
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10-1125352 Cavitation Threshold Characterization & Control – Korea
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Related Topics
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Published Conference Papers
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Articles in Industry Publications
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Megasonic Cleaning Charts a Course to the Big Time, Precision Cleaning
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Megasonics Help 'Stream' Line Sensitive Substrate Cleaning
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Technical Briefs
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What is megasonic cleaning?
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What is the boundary layer as it relate to megasonic cleaning?

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