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Powerful Results for Advanced Processes & Critical Cleaning
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ProSys Megasonic cleaning systems and technology can enable you to:
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Quickly, safely, and effectively clean contamination-sensitive products
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Improve your removal efficiency to above 99%
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Reduce process time
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Using high-frequency acoustic energy, our advanced megasonics technology enables you to more tightly control your process and to make it faster and more efficient.
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Problems we solve include:
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FEOL and BEOL cleans
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Post-CMP/polish cleaning
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Photoresist develop and strip, including thick resist
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TSV & HAR cleaning and residual polymer removal
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LIGA/MEMS process applications
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Pre-bond cleaning
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Mask cleaning
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Solar process applications
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<empty>NEWS<empty>
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ProSys MegPie™ V3 Shipments Surpass 1,100 Systems
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read more
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ProSys Ships Direct Megasonic System that Replaces Curved-Crystal Systems
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read more
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ProSys Announces Shipment of Direct Megasonic System Replacement for Sunburst Turbo System.
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read more
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ProSys Direct Megasonic System
with Patented Array Technology
Delivers the Results You Need.
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Improved device yield,
lower cost of ownership, and
competitive capital expenditure
add up to an attractive payback.

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© 2020 ProSys Inc.
     
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MegPie V4 banner-link to download page logo links to home page Direct Megasonic System image links to product page Solar MegBar image links to product note Impulse RF image links to product note Plate Array image links to product note Sapphire MegPie image links to product note Immersible Array image links to product note